Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology

Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer

Byung-Ho Jo, L.M. Van Lerberghe, Kathleen M. Motsegood et al. · Journal of Microelectromechanical Systems · 2000 · 1.1K citations

Engineering, Materials Engineering, Materials Science +17

The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications

Joost Conrad Lötters, Wouter Olthuis, Petrus H. Veltink et al. · Journal of Micromechanics and Microengineering · 1997 · 821 citations · Full text

Engineering, Materials Engineering, Materials Science +17

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Injection molding of polymeric LIGA HARMs

Mircea S. Despa, Kevin W. Kelly, John R. Collier · Microsystem Technologies · 1999 · 108 citations

Engineering, Manufacturing Engineering, Materials Engineering +9

Fabrication of high-aspect-ratio microstructures on planar and nonplanar surfaces using a modified LIGA process

C. Marques, Yohannes M. Desta, James G. Rogers et al. · Journal of Microelectromechanical Systems · 1997 · 59 citations

Engineering, Materials Engineering, Materials Science +15