The effect of dimensional scaling on the erase characteristics of NOR flash memory

W.H. Lee

IEEE Electron Device Letters · 2003 · 11 citations · 4 references

Concepts

Abstract

In this letter, new limitations on the NOR flash cell scaling have been presented. As cell scaling is continued, a parasitic capacitance between floating gate and bitline contact induces a large disturbance to the Fowler-Nordheim tunneling characteristics due to a coupling ratio variation, resulting in a much broader erase threshold distribution. Theoretical analysis including MEDICI simulations confirms the effects of parasitic capacitance on the erase threshold of NOR flash cells.

References

4