Thermally driven microgripper as a tool for micro assembly

SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures

K.A. Shaw, Z.Lisa Zhang, Noel C. MacDonald · Sensors and Actuators A Physical · 1994 · 269 citations · Full text

Engineering, Single-crystal Silicon, Single Lithography Step +23

Towards a force-controlled microgripper for assembling biomedical microdevices

Maria Chiara Carrozza, A. Eisinberg, Arianna Menciassi et al. · Journal of Micromechanics and Microengineering · 2000 · 142 citations

Electrostatically driven microgripper

B. Volland, H. Heerlein, Ivo W. Rangelow · Microelectronic Engineering · 2002 · 124 citations

Electrical Engineering, Energy Harvesting, Engineering +4

A RIE process for submicron, silicon electromechanical structures

Z L Zhang, Noel C. MacDonald · Journal of Micromechanics and Microengineering · 1992 · 96 citations

Materials Science, Engineering, Rie Process +15

The application of secondary effects in high aspect ratio dry etching for the fabrication of MEMS

B. Volland, H. Heerlein, I. Kostič et al. · Microelectronic Engineering · 2001 · 29 citations

Materials Science, Wafer Scale Processing, Engineering +8