31
Publications
959
Citations
17
H-Index
2006
Active since
Tzvetan Ivanov is an author at Technische Universität Ilmenau specializing in materials science, engineering, and applied physics.
Top concepts
EngineeringMaterial ScienceMicrofabricationApplied PhysicsMicroscopyNanotechnologyNanofabricationNanolithographyMicroelectronicsElectrical Engineering
Publications per year
2006–2023
31
31
Components for high speed atomic force microscopy
Georg E. Fantner, Georg Schitter, Johannes H. Kindt et al. · Ultramicroscopy · 2006 · 237 citations · Full text
Pattern-generation and pattern-transfer for single-digit nano devices
Ivo W. Rangelow, Ahmad Ahmad, Tzvetan Ivanov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 42 citations · Full text
Engineering, Electron-beam Lithography, Pattern Transfer +20
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