Concepedia

Publication | Closed Access

Fabrication and characterization of folded SU-8 suspensions for MEMS applications

DOI

56

Citations

12

References

2006

Year

Daniel Bachmann, Bernd Schöberle, S Kühne, Yves Leiner, Christofer Hierold
Sensors and Actuators A Physical

References

YearCitations

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