Concepedia

S Kühne

SK

Statistics

Publications

11

Citations

327

H-Index

10

Active since

2006

Affiliations

ETH Zurich(Current)

University of Stuttgart

S Kühne is an author at ETH Zurich specializing in microelectromechanical systems, engineering, and microfabrication.

Publications per year

2006–2013

11

Publications

11

Fabrication and characterization of folded SU-8 suspensions for MEMS applications

Daniel Bachmann, Bernd Schöberle, S Kühne et al. · Sensors and Actuators A Physical · 2006 · 56 citations

Engineering, Materials Engineering, Materials Science +11

Influence of air humidity on polymeric microresonators

Silvan Schmid, S Kühne, Christofer Hierold · Journal of Micromechanics and Microengineering · 2009 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +14

Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

S Kühne, M. Gräf, Antonio Tricoli et al. · Journal of Micromechanics and Microengineering · 2008 · 46 citations

Engineering, Materials Engineering, Materials Science +17

Wafer-level packaging and direct interconnection technology based on hybrid bonding and through silicon vias

S Kühne, Christofer Hierold · Journal of Micromechanics and Microengineering · 2011 · 38 citations

Engineering, Materials Engineering, Materials Science +17

Power enhancement of micro thermoelectric generators by microfluidic heat transfer packaging

N. Wojtas, E. Schwyter, W. Glatz et al. · Sensors and Actuators A Physical · 2011 · 32 citations

Engineering, Electrical Engineering, Materials Engineering +16

1–5 of 11