Concepedia

Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

S Kühne, M. Gräf, Antonio Tricoli, F. Mayer, Sotiris E. Pratsinis, Andreas Hierlemann

Journal of Micromechanics and Microengineering · 2008 · 46 citations · 26 references

Abstract

This paper presents a CMOS-compatible wafer-level fabrication process for monolithic CMOS/MEMS sensor systems coated with sensitive layers directly deposited by means of flame spray pyrolysis (FSP). Microhotplate (νHP)-based devices, featuring an FSP dir

References

26

The tension of metallic films deposited by electrolysis

G. Stoney · Proceedings of the Royal Society of London Series A Containing Papers of a Mathematical and Physical Character · 1909 · 4.8K citations · Full text

Natural Sciences, Chemistry, Materials Science +11

Conduction Model of Metal Oxide Gas Sensors

Nicolae Bârsan, Udo Weimar · Journal of Electroceramics · 2001 · 2.6K citations

Natural Sciences, Materials Engineering, Materials Science +14

Fundamental and practical aspects in the design of nanoscaled SnO 2 gas sensors: a status report

Nicolae Bârsan, M. Schweizer-Berberich, W. Göpel · Fresenius Journal of Analytical Chemistry · 1999 · 775 citations

Engineering, Materials Engineering, Materials Science +17

Controlled synthesis of nanostructured particles by flame spray pyrolysis

Lutz Mädler, Hendrik K. Kammler, Roger Mueller et al. · Journal of Aerosol Science · 2002 · 768 citations

Engineering, Materials Engineering, Materials Science +10

Micromachined metal oxide gas sensors: opportunities to improve sensor performance

Isolde Simon, Nicolae Bârsan, Michael Bauer et al. · Sensors and Actuators B Chemical · 2001 · 645 citations

Engineering, Materials Engineering, Materials Science +14