A super low noise V-band AlInAs/InGaAs HEMT processed by selective wet gate recess etching

N. Yoshida, T. Kitano, Yoshiyuki Yamamoto, Kaoru Katoh, H. Minami, H. Takano, T. Sonoda, S. Takamiya, S. Mitsui

2002 · 16 citations · 11 references

Concepts

Abstract

A 0.15 /spl mu/m T-shaped gate AlInAs/InGaAs high electron mobility transistor (HEMT) with excellent RF performances has been developed using a selective wet gate recess etching. An extremely low minimum noise figure (Fmin) of 0.9 dB with an associated gain (Ga) of 7.0 dB has been achieved at 60 GHz for a SiON-passivated device. This is the lowest value of Fmin ever reported for AlInAs/InGaAs HEMT with a passivation film.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

References

11