High-performance submicrometer AlInAs-GaInAs HEMT's

Abstract

The performance of long (1.3- mu m) and short (0.3- mu m) gate-length Al/sub 0.48/In/sub 0.52/ As-Ga/sub 0.47/In/sub 0.53/ high-electron-mobility transistors (HEMTs) is reported. Transconductances of 465 and 650 mS/mm, respectively, were achieved. The 0.3- mu m-long gate-length device exhibited an f/sub t/>80 GHz. These results are attributed to the excellent electronic properties of the AlInAs-GaInAs modulation-doped system.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>