2002 · 15 citations · 9 references
EngineeringManufacturing EngineeringMechanical EngineeringAutomationMicroelectromechanical SystemsMicrofabricationMagnetic ActuationMagnetic ActuatorsMems DesignMems FabricationMicrofabrication ProcessesMicromachiningMagnetic LevitationMagnetic Levitation ActuationMagnetic Levitation ActuatorsMagnetic MicroactuatorsMicroelectromechanical System FabricationMicromanipulation
Micro-automation systems that operate through magnetic levitation of a micromanipulator are discussed. Applications of such systems include positioning, probing, and quality control tasks. Tools used in the design of magnetic levitation-based micro-automation systems and results obtained from demonstration systems are given. A review of work in progress is included.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
9
Design considerations for micromachined electric actuators
Stephen F. Bart, T.A. Lober, Roger T. Howe et al. · Sensors and Actuators · 1988 · 136 citations
Engineering, Electrical Engineering, Mechanical Engineering +13