Concepedia

3-inch single-crystal LiTaO <sub>3</sub> films onto metallic electrode using Smart Cut <sup>TM</sup> technology

A. Tauzin, J. Dechamp, F. Madeira, F. Mazen, Marc Zussy, C. Deguet, L. Clavelier, J.S. Moulet, C. Richtarch, T. Akatsu,

Electronics Letters · 2008 · 20 citations · 5 references

DOI

Concepts

Abstract

The Smart CutTM technology has been used for LiTaO3 layer transfer. A 3-inch full wafer single-crystal LiTaO3 layer onto a carrier wafer comprising a metallic electrode is reported.

References

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