Wafer Materials

Wafer Materials is a semiconductor substrate category consisting of highly purified crystalline materials, typically silicon or compound semiconductors, distinguished by their specific crystal structure, electrical properties, and readiness for microfabrication processes in the production of integrated circuits and discrete devices.

580

Publications

19.9K

Citations

2.9K

Authors

646

Institutions

Publications per year

2017–2026

112

Authors

2.9K

  1. UG
    U. Gösele

    Max Planck Institute of Microstructure Physics, Germany

    6 publications · 300 citations

    6

    h-index

  2. LF
    L. Fabry

    University of Regensburg, Germany

    5 publications · 75 citations

    5

    h-index

  3. DH
    David Ho

    Agency for Science, Technology and Research, Singapore

    4 publications · 227 citations

    4

    h-index

  4. EB
    Eric Beyne

    IMEC, Belgium

    4 publications · 85 citations

    4

    h-index

  5. ME
    Masayoshi Esashi

    Tohoku University, Japan

    4 publications · 136 citations

    4

    h-index

1–5 of 2.9K

Venues

  1. Applied Physics Letters

    27 publications · 1.7K citations

    18

    h-index

  2. Journal of Crystal Growth

    32 publications · 613 citations

    16

    h-index

  3. Japanese Journal of Applied Physics

    JJAP · 24 publications · 941 citations

    16

    h-index

  4. Journal of The Electrochemical Society

    JES · 21 publications · 843 citations

    15

    h-index

  5. Microelectronic Engineering

    15 publications · 368 citations

    13

    h-index

1–5