Concepedia

L. Fabry

LF

Statistics

Publications

33

Citations

799

H-Index

20

Active since

1978

Affiliations

University of Regensburg(Current)

Wacker (United States)

Stanford Synchrotron Radiation Lightsource

Universities Austria

Physikalisch-Technische Bundesanstalt

L. Fabry is an author at University of Regensburg specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceChemical EngineeringMicroelectronicsPhysicsChemistrySurface ScienceSynchrotron RadiationInstrumentation

Publications per year

1978–2006

33

Publications

33

Determination of ultra trace contaminants on silicon wafer surfaces using total-reflection X-ray fluorescence TXRF ‘state-of-the-art’

S. Pahlke, L. Fabry, L. Kotz et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 2001 · 67 citations

Surface Characterization, Chemical Engineering, Engineering +8

Analysis of Ni on Si-wafer surfaces using synchrotron radiation excited total reflection X-ray fluorescence analysis

P. Wobrauschek, R. Görgl, Peter Kregsamer et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 1997 · 46 citations

Surface Characterization, Engineering, Physics +9

Low Z total reflection X-ray fluorescence analysis — challenges and answers

Christina Streli, Peter Kregsamer, P. Wobrauschek et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 1999 · 39 citations

X-ray Spectroscopy, Health Sciences, Physics +9

Total reflection X-ray fluorescence analysis of light elements with synchrotron radiation and special X-ray tubes

Christina Streli, P. Wobrauschek, V. Bauer et al. · Spectrochimica Acta Part B Atomic Spectroscopy · 1997 · 34 citations

Light Elements, X-ray Spectroscopy, Special X-ray Tubes +12

Gettering of Copper and Nickel in p/p+ Epitaxial Wafers

Robert Hoelzl, D. Huber, K.‐J. RANGE et al. · Journal of The Electrochemical Society · 2000 · 32 citations · Full text

Materials Engineering, Materials Science, Wafer Scale Processing +14

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