Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy - Concepedia

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Investigations on hydrophilic and hydrophobic silicon (100) wafer surfaces by X-ray photoelectron and high-resolution electron energy loss-spectroscopy

410

Citations

22

References

1986

Year

M. Grundner, H.‐E. Jacob

Applied Physics A

Materials ScienceWafer SurfacesSurface CharacterizationWafer Scale ProcessingEngineeringHydrophobic SiliconSurface AnalysisSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorX-ray Photoelectron

References

	Year	Citations

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