Publication | Closed Access
Silicon on insulator material technology
995
Citations
5
References
1995
Year
Materials EngineeringMaterials ScienceElectrical EngineeringWafer Scale ProcessingEngineeringAdvanced Packaging (Semiconductors)Insulator Material TechnologyMicrofabricationApplied PhysicsSiliceneChip AttachmentSemiconductor Device FabricationElectronic PackagingWafer BondingMicroelectronicsHeat TreatmentSilicon On InsulatorElectrical Insulation
A silicon on insulator material technology based on wafer bonding is described, in which a heat treatment induces an in-depth microslicing of one of the two bonded wafers previously implanted with hydrogen. The basic phenomena, and the first physical and electrical characterisations are discussed briefly.
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