M. Bruel - Concepedia

Author

M. Bruel

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Also Known As

Bruel, M., M Bruel, M. BRUEL, M. Bruel, MICHEL BRUEL, Michel Bruel

Publications

3.2K

Citations

H-Index

Concepts

All Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives CEA Grenoble Laboratoire d'Électronique des Technologies de l'Information Soitec (France)Centre National de la Recherche Scientifique

About

M. Bruel is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, materials science, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	21	31	2.7K
2	Applied Physics	16	19	2.2K
3	Biomedical Engineering	3	3	111
4	Chemical Engineering	3	3	85
5	Medicine	1	1	10

M. Bruel

Publications

3.1K

Citations

H-Index

Page 1

	Year	Citations
Silicon on insulator material technology M. Bruel Electronics Letters Materials EngineeringMaterials ScienceElectrical EngineeringWafer Scale ProcessingEngineering	1995	995
Application of hydrogen ion beams to Silicon On Insulator material technology M. Bruel Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Materials EngineeringIon ImplantationEngineeringInsulator Material TechnologyMicrofabrication	1996	311
Smart-Cut: A New Silicon On Insulator Material Technology Based on Hydrogen Implantation and Wafer Bonding<sup>*1</sup> M. Bruel, Bernard ASPAR Andre-Jacques AUBERTON-HERVE Japanese Journal of Applied Physics EngineeringDevice IntegrationSilicon On InsulatorIon ImplantationElectronic Devices	1997	235
Basic mechanisms involved in the Smart-Cut® process B. Aspar, M. Bruel, H. Moriceau, Microelectronic Engineering Industrial DesignEngineeringDigital ManufacturingBasic MechanismsProcessing And Manufacturing	1997	138
Silicon carbide on insulator formation using the Smart Cut process [Note 1] L. Di Cioccio, Y. Le Tiec, F. Letertre, Electronics Letters	1996	120
Silicon carbide on insulator formation by the Smart-Cut® process L. Di Cioccio, F. Letertre, Y. Le Tiec, Materials Science and Engineering B Materials ScienceMaterials EngineeringEngineeringMaterial ProcessingSemiconductor Device Fabrication	1997	97
Microstructure of silicon implanted with high dose oxygen ions C. Jaussaud, J. Stoëmenos, J. Margail, Applied Physics Letters Materials ScienceOxide HeterostructuresHeat TreatmentIon ImplantationEngineering	1985	92
The History, Physics, and Applications of the Smart-Cut® Process M. Bruel MRS Bulletin Digital ManufacturingSmart-cut® ProcessTechnology	1998	86
Transfer of 3 in GaAs film on silicon substrateby proton implantation process E. Jalaguier, B. Aspar, S. Pocas, Electronics Letters	1998	83
New conditions for synthesizing SOI structures by high dose oxygen implantation J. Stoëmenos, C. Jaussaud, M. Bruel, Journal of Crystal Growth Materials EngineeringMaterials ScienceEngineeringSoi StructuresNew Conditions	1985	79

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