M. Bruel

Silicon on insulator material technology

M. Bruel · Electronics Letters · 1995 · 995 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Application of hydrogen ion beams to Silicon On Insulator material technology

M. Bruel · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 311 citations

Materials Engineering, Ion Implantation, Engineering +7

Smart-Cut: A New Silicon On Insulator Material Technology Based on Hydrogen Implantation and Wafer Bonding^*1

M. Bruel, Bernard ASPAR Andre-Jacques AUBERTON-HERVE · Japanese Journal of Applied Physics · 1997 · 235 citations

Engineering, Device Integration, Silicon On Insulator +19

Basic mechanisms involved in the Smart-Cut® process

B. Aspar, M. Bruel, H. Moriceau et al. · Microelectronic Engineering · 1997 · 138 citations

Industrial Design, Engineering, Digital Manufacturing +3

Silicon carbide on insulator formation using the Smart Cut process [Note 1]

L. Di Cioccio, Y. Le Tiec, F. Letertre et al. · Electronics Letters · 1996 · 120 citations