Concepedia

Publication | Closed Access

Basic mechanisms involved in the Smart-Cut® process

DOI

138

Citations

10

References

1997

Year

B. Aspar, M. Bruel, H. Moriceau, Christophe Maleville, T. Poumeyrol, A.M. Papon, A. Claverie, G. Benassayag, A.J. Auberton‐Hervé, T. Barge
Microelectronic Engineering

References

YearCitations

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