Concepedia
Statistics
Publications
19
Citations
685
H-Index
16
Active since
1997
Affiliations
Soitec (France)(Current)
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
CEA Grenoble
Max Planck Institute of Microstructure Physics
Direction de la Recherche Technologique
T. Akatsu is an author at Soitec (France) specializing in materials science, materials engineering, and engineering.
Publications per year
1997–2008
Germanium-on-insulator (GeOI) substrates—A novel engineered substrate for future high performance devices
T. Akatsu, C. Deguet, Loïc Sanchez et al. · Materials Science in Semiconductor Processing · 2006 · 130 citations
Engineering, Materials Engineering, Materials Science +11
Transfers of 2-inch GaN films onto sapphire substrates using Smart Cut <sup>TM</sup> technology
A. Tauzin, T. Akatsu, Marc Rabarot et al. · Electronics Letters · 2005 · 67 citations
Engineering, Materials Engineering, Materials Science +14
Fabrication and characterisation of 200 mm germanium-on-insulator (GeOI) substrates made from bulk germanium
C. Deguet, L. Sanchez, T. Akatsu et al. · Electronics Letters · 2006 · 66 citations
Engineering, Materials Engineering, Materials Science +13
Atomic structure of Al/Al interface formed by surface activated bonding
T. Akatsu, N. Hosoda, Tadatomo Suga et al. · Journal of Materials Science · 1999 · 51 citations
Natural Sciences, Materials Engineering, Materials Science +14
Wafer bonding of different III–V compound semiconductors by atomic hydrogen surface cleaning
T. Akatsu, Roland W. Scholz, H. Stenzel et al. · Journal of Applied Physics · 2001 · 49 citations
Engineering, Materials Engineering, Materials Science +17
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