Concepedia

Publication | Closed Access

Germanium-on-insulator (GeOI) substrates—A novel engineered substrate for future high performance devices

DOI

128

Citations

16

References

2006

Year

T. Akatsu, C. Deguet, Loïc Sanchez, F. Allibert, D. Rouchon, Thomas Signamarcheix, C. Richtarch, Alice Boussagol, V. Loup, Frédéric Mazen,
Materials Science in Semiconductor Processing

References

YearCitations

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