Marc Rabarot

Statistics

Publications

Citations

173

H-Index

Active since

2003

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

Laboratoire d'Électronique des Technologies de l'Information

CEA Grenoble

Institut polytechnique de Grenoble

Université Grenoble Alpes

Marc Rabarot is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, semiconductor devices, and materials science.

Publications per year

2003–2010

Publications

Transfers of 2-inch GaN films onto sapphire substrates using Smart Cut <sup>TM</sup> technology

A. Tauzin, T. Akatsu, Marc Rabarot et al. · Electronics Letters · 2005 · 67 citations

Engineering, Materials Engineering, Materials Science +14

Silicon-On-Diamond layer integration by wafer bonding technology

Marc Rabarot, J. Widiez, S. Saada et al. · Diamond and Related Materials · 2010 · 31 citations

Engineering, Materials Engineering, Materials Science +13

Engineered substrates for future More Moore and More than Moore integrated devices

L. Clavelier, C. Deguet, L. Di Cioccio et al. · 2010 · 28 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cut™ technology

J. Widiez, Marc Rabarot, S. Saada et al. · Solid-State Electronics · 2009 · 21 citations

Engineering, Materials Engineering, Materials Science +13

Thick SU-8 photolithography for BioMEMS

Marc Rabarot, J. Bablet, Marine Ruty et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 15 citations

Engineering, Manufacturing Engineering, Materials Science +17

1–5 of 6