Concepedia

Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cut™ technology

J. Widiez, Marc Rabarot, S. Saada, Jean-Paul Mazellier, J. Dechamp, V. Delaye, J.C. Roussin, F. Andrieu, O. Faynot, S. Deleonibus,

Solid-State Electronics · 2009 · 21 citations · 4 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicrofabricationSemiconductor DevicesEtching ProcessesIntegrated Circuit FabricationSemiconductor Device MaterialsSilicon MaterialsSubstrate PreparationWafer BondingSilicon EtchingSilicon Wafer PreparationSilicon Wafer ProcessingSilicon-on-insulator Processing

References

4

Silicon on insulator material technology

M. Bruel · Electronics Letters · 1995 · 1K citations

Engineering, Materials Engineering, Materials Science +16

Radiation response of silicon on diamond (SOD) devices

N.K. Annamalai, James D. Sawyer, Pramod C. Karulkar et al. · IEEE Transactions on Nuclear Science · 1993 · 36 citations

Engineering, Electrical Engineering, Materials Science +17

Effect of Prebonding Surface Treatments on Si-Si Direct Bonding : Bonding Void Decrease

R. Beneyton, Frank Fournel, F. Rieutord et al. · ECS Transactions · 2006 · 13 citations

Engineering, Materials Engineering, Materials Science +17

Synthesis and characterisation of NCD films on 10 × 10 mm<sup>2</sup> and deposition on 2 inch wafer using rotating substrate‐holder set‐up

S. Saada, Jean‐Charles Arnault, L.A. Rocha et al. · physica status solidi (a) · 2008 · 10 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16