Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cut™ technology - Concepedia

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Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cut™ technology

21

Citations

4

References

2009

Year

J. Widiez, Marc Rabarot, S. Saada, Jean-Paul Mazellier, J. Dechamp, V. Delaye, J.C. Roussin, F. Andrieu, O. Faynot, S. Deleonibus,

Solid-State Electronics

Materials ScienceMaterials EngineeringDiamond-like CarbonEngineeringMicrofabricationMaterials FabricationSilicon On InsulatorFabrication TechniqueApplied PhysicsSemiconductor Device FabricationTechnologySmart-cut™ TechnologyEtched-back Soi

References

	Year	Citations

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