H. Stenzel

Statistics

Publications

Citations

258

H-Index

Active since

1995

Affiliations

Max Planck Institute of Microstructure Physics(Current)

H. Stenzel is an author at Max Planck Institute of Microstructure Physics specializing in materials science, engineering, and semiconductor materials.

Publications per year

1995–2001

Publications

Self-propagating room-temperature silicon wafer bonding in ultrahigh vacuum

U. Gösele, H. Stenzel, Torsten Martini et al. · Applied Physics Letters · 1995 · 111 citations

Engineering, Materials Engineering, Materials Science +11

Wafer bonding of different III–V compound semiconductors by atomic hydrogen surface cleaning

T. Akatsu, Roland W. Scholz, H. Stenzel et al. · Journal of Applied Physics · 2001 · 49 citations

Engineering, Materials Engineering, Materials Science +17

GaAs wafer bonding by atomic hydrogen surface cleaning

T. Akatsu, A. Plößl, H. Stenzel et al. · Journal of Applied Physics · 1999 · 48 citations

Engineering, Materials Engineering, Materials Science +17

History and Future of Semiconductor Wafer Bonding

U. Gösele, H. Stenzel, Manfred Reiche et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1995 · 26 citations

Engineering, Electrical Engineering, Materials Science +12

What determines the lateral bonding speed in silicon wafer bonding?

U. Gösele, S. Hopfe, S. Li et al. · Applied Physics Letters · 1995 · 24 citations

Engineering, Materials Engineering, Materials Science +10

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