Microelectronic Engineering · 2013 · 11 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsMetal Oxide NanomaterialsMetal OxidesMetalsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor HeterostructuresAluminum NitrideGate Oxide InterfacesGate OxidesGate Stack Engineering
10
Effective Passivation of AlGaN/GaN HEMTs by ALD-Grown AlN Thin Film
Sen Huang, Qimeng Jiang, Shu Yang et al. · IEEE Electron Device Letters · 2012 · 246 citations
Chihoko Mizue, Yujin Hori, Marcin Miczek et al. · Japanese Journal of Applied Physics · 2011 · 243 citations
Chihoko Mizue, Yujin Hori, Marcin Miczek et al. · Japanese Journal of Applied Physics · 2011 · 140 citations · Full text