Ni/Au–Al2O3 gate stack prepared by low-temperature ALD and lift-off for MOS HEMTs

M. Blaho, D. Gregušová, M. Jurkovič, J. Fedor, P. Kordoš, K. Fröhlich, Frank Brunner, Melani Cho, Oliver Hilt, Joachim Würfl

Microelectronic Engineering · 2013 · 11 citations · 10 references

DOIFull text

Open access

Concepts

References

10