Publication | Closed Access
Defect-selective etching of bulk AlN single crystals in molten KOH/NaOH eutectic alloy
74
Citations
12
References
2003
Year
Materials EngineeringMaterials ScienceAluminium NitrideEngineeringApplied PhysicsDefect-selective EtchingPlasma EtchingMicrostructure
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