Journal of Crystal Growth · 2003 · 75 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureMaterials ChemistryMetallurgyAlloysCrystal EngineeringEtching ProcessesMetalsAluminum NitrideEtch ChemistryEtch MechanismsEtch-induced DefectsEtchingSelective Etching
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Shuji Nakamura, Masayuki Senoh, Shin‐ichi Nagahama et al. · Applied Physics Letters · 1998 · 732 citations