Applied Physics Letters · 1981 · 77 citations · 6 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicrofabricationSemiconductor MaterialsChemical Vapor DepositionGrain GrowthGrain Structure AnalysisLaser Material ProcessingMicrostructure ControlSilicon MaterialsCrystalline SiliconGrain Size ImprovementPolycrystalline SiliconPolysiliconQuartzSiliconSilicon Crystal GrowthSilicon Microstructures
Laser beam shaping has been used to increase the grain size of laser-recrystallized polycrystalline silicon on amorphous substrates. Using a slanted liquid-solid interface, rectangular grains as large as 45×50 μm have been grown in 0.5-μm-thick chemical vapor deposited polysilicon on quartz substrates. Improved surface smoothness of recrystallized material has also been achieved using this procedure.
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