Electrostatically deflectable polysilicon micromirrors — dynamic behaviour and comparison with the results from FEM modelling with ANSYS - Concepedia

Concepedia

Publication | Closed Access

Electrostatically deflectable polysilicon micromirrors — dynamic behaviour and comparison with the results from FEM modelling with ANSYS

54

Citations

8

References

1998

Year

Matthias Fischer, M. Giousouf, Joerg Schaepperle, D Eichner, Markus Weinmann, Waldemar von Münch, F. Assmus

Sensors and Actuators A Physical

EngineeringMicromachinesMicrofabricationMechanicsDynamic BehaviourMechanical EngineeringApplied PhysicsDeflectable Polysilicon MicromirrorsMicroactuatorMicroelectronicsMechanics Of MaterialsMicro-electromechanical System

References

	Year	Citations

Page 1

Page 1