Concepedia

Electrostatic Micromirrors

Electrostatic Micromirror is a microelectromechanical system (genus) that enables precise angular deflection of a reflective surface through electrostatic actuation forces generated by applied voltages between the mirror and underlying electrodes (differentia).

113

Publications

4.1K

Citations

388

Authors

108

Institutions

Publications per year

2017–2026

8

Variants

Electrostatic Micromirror

Parents

Publications

113

Flexible mirror micromachined in silicon

Gleb Vdovin, P.M. Sarro · Applied Optics · 1995 · 176 citations

, , +16

Optical MEMS: From Micromirrors to Complex Systems

Olav Solgaard, A. A. Godil, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 2014 · 171 citations · Full text

, , +17

A Flat High-Frequency Scanning Micromirror

Robert A. Conant, Julia Nee, K.Y. Lau et al. · 2000 · 157 citations · Full text

, , +15

Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning

Meng-Hsiung Kiang, Olav Solgaard, K.Y. Lau et al. · Journal of Microelectromechanical Systems · 1998 · 144 citations

, , +17

Beam-steering micromirrors for large optical cross-connects

Vladimir Aksyuk, F. Pardo, D. W. Carr et al. · Journal of Lightwave Technology · 2003 · 143 citations · Full text

, , +15

1–5 of 113

Authors

388

  1. OS
    Olav Solgaard

    Stanford University, United States

    7 publications · 611 citations

    7

    h-index

  2. FE
    Francis E. H. Tay

    National University of Singapore, Singapore

    5 publications · 108 citations

    5

    h-index

  3. RM
    R.S. Muller

    University of California, Berkeley, United States

    5 publications · 416 citations

    5

    h-index

  4. KL
    K.Y. Lau

    University of California, Berkeley, United States

    4 publications · 373 citations

    4

    h-index

  5. CH
    Carlos H. Mastrangelo

    University of Michigan, United States

    4 publications · 102 citations

    4

    h-index

1–5 of 388

Institutions

108

  1. University of California, Berkeley

    Berkeley, United States

    8 h-index

    26 publications

    2.1K citations

  2. National University of Singapore

    Singapore, Singapore

    5 h-index

    18 publications

    394 citations

  3. Polytechnique Montréal

    Montreal, Canada

    5 h-index

    13 publications

    456 citations

  4. Stanford University

    Stanford, United States

    5 h-index

    14 publications

    1.1K citations

  5. Delft University of Technology

    Delft, The Netherlands

    3 h-index

    6 publications

    439 citations

  6. Sharif University of Technology

    Tehran, Iran

    3 h-index

    6 publications

    90 citations

  7. Fraunhofer Institute for Photonic Microsystems

    Dresden, Germany

    3 h-index

    12 publications

    132 citations

  8. Tohoku University

    Sendai, Japan

    3 h-index

    7 publications

    175 citations

1–8 of 108

Venues

  1. Journal of Microelectromechanical Systems

    15 publications · 912 citations

    15

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 12 publications · 357 citations

    11

    h-index

  3. 10

    h-index

  4. Sensors and Actuators A Physical

    8 publications · 313 citations

    7

    h-index

  5. Microsystem Technologies

    4 publications · 122 citations

    4

    h-index

1–5