Concepedia

Mems Micromirrors

MEMS Micromirrors is a microelectromechanical system comprising a reflective optical surface fabricatable through semiconductor processes and designed to achieve precise, controllable angular deflection for beam steering, modulation, or switching in optical systems.

416

Publications

13.3K

Citations

1.3K

Authors

293

Institutions

Publications per year

2017–2026

73

Variants

Micro-electromechanical Systems Micromirrors

Parents

Publications

416

A MEMS-based projection display

Peter F. Van Kessel, Larry J. Hornbeck, Reto Meier et al. · Proceedings of the IEEE · 1998 · 614 citations

, , +15

Two-Axis Electromagnetic Microscanner for High Resolution Displays

Arda D. Yalçınkaya, Hakan Ürey, Dean Brown et al. · Journal of Microelectromechanical Systems · 2006 · 359 citations

, , +16

Magnetically actuated, addressable microstructures

Jack W. Judy, R.S. Muller · Journal of Microelectromechanical Systems · 1997 · 260 citations

, , +17

Wavelength-selective 1/spl times/K switches using free-space optics and MEMS micromirrors: theory, design, and implementation

Dan M. Marom, David T. Neilson, Dennis S. Greywall et al. · Journal of Lightwave Technology · 2005 · 200 citations

, , +16

Titanium-alloy MEMS wing technology for a micro aerial vehicle application

T.N. Pornsin-Sirirak, Yuan‐Chuan Tai, Hany Nassef et al. · Sensors and Actuators A Physical · 2001 · 197 citations

, , +14

1–5 of 416

Authors

1.3K

  1. HX
    Huikai Xie

    University of Florida, United States

    22 publications · 722 citations

    17

    h-index

  2. MC
    Ming C. Wu

    University of California, Berkeley, United States

    14 publications · 578 citations

    13

    h-index

  3. VM
    Victor M. Bright

    University of Colorado Boulder, United States

    14 publications · 322 citations

    12

    h-index

  4. HS
    Harald Schenk

    Fraunhofer Institute for Photonic Microsystems, Germany

    12 publications · 206 citations

    10

    h-index

  5. HT
    Hiroshi Toshiyoshi

    The University of Tokyo, Japan

    10 publications · 436 citations

    10

    h-index

1–5 of 1.3K

Institutions

293

  1. University of California, Berkeley

    Berkeley, United States

    17 h-index

    59 publications

    2.5K citations

  2. University of Florida

    Gainesville, United States

    16 h-index

    49 publications

    1.5K citations

  3. Texas Instruments (United States)

    Dallas, United States

    14 h-index

    32 publications

    3.4K citations

  4. University of Waterloo

    Waterloo, Canada

    13 h-index

    27 publications

    651 citations

  5. University of California, Los Angeles

    Los Angeles, United States

    12 h-index

    49 publications

    2.6K citations

  6. Fraunhofer Institute for Photonic Microsystems

    Dresden, Germany

    11 h-index

    63 publications

    990 citations

  7. Chinese Academy of Sciences

    Beijing, China

    9 h-index

    22 publications

    888 citations

  8. Tohoku University

    Sendai, Japan

    9 h-index

    25 publications

    572 citations

1–8 of 293

Venues

  1. Sensors and Actuators A Physical

    42 publications · 1.7K citations

    27

    h-index

  2. Journal of Microelectromechanical Systems

    31 publications · 2K citations

    24

    h-index

  3. 20

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 24 publications · 829 citations

    18

    h-index

  5. Optics Express

    15 publications · 437 citations

    13

    h-index

1–5