Publication | Closed Access
Characteristics and fabrication of NiTi/Si diaphragm micropump
146
Citations
8
References
2001
Year
Materials ScienceNiti/si Diaphragm MicropumpEngineeringMicrofabricationMechanical EngineeringMicroactuatorMicroelectronicsMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1