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Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine

DOI

18

Citations

19

References

2002

Year

Edward S. Kolesar, Matthew D. Ruff, William E. Odom, Joseph A Jayachadran, Justin McAllister, Simon Y. Ko, Jeffery T. Howard, Peter B. Allen, Josh M. Wilken, Noah C. Boydston,
Thin Solid Films

References

YearCitations

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