Concepedia

Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine

Edward S. Kolesar, Matthew D. Ruff, William E. Odom, Joseph A Jayachadran, Justin McAllister, Simon Y. Ko, Jeffery T. Howard, Peter B. Allen, Josh M. Wilken, Noah C. Boydston,

Thin Solid Films · 2002 · 18 citations · 19 references

Concepts

EngineeringElectrical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationMems DesignMicrofabrication ProcessesMicromachiningSurface MicromachiningThermal ActuationThermal ActuatorsMicroactuatorsMicroenginesPolysiliconPolysilicon Surface MicromachiningThermal Microactuators

References

19

Thermally excited silicon microactuators

W. Riethmüller, W. Benecke · IEEE Transactions on Electron Devices · 1988 · 294 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Analysis of tip deflection and force of a bimetallic cantilever microactuator

Wen-Hwa Chu, Mehran Mehregany, Robert L. Mullen · Journal of Micromechanics and Microengineering · 1993 · 250 citations

Engineering, Mechanical Engineering, Applied Mechanics +13

Thermo-magnetic metal flexure actuators

H. Guckel, J. Klein, Todd R. Christenson et al. · 2003 · 208 citations

Engineering, Materials Engineering, Materials Science +16

Sensor Technology and Devices

Sensor Review · 1998 · 185 citations

Engineering, Materials Engineering, Materials Science +16

An electro-thermally and laterally driven polysilicon microactuator

Chi Shiang Pan, Wensyang Hsu · Journal of Micromechanics and Microengineering · 1997 · 152 citations

Engineering, Mechanical Engineering, Robotics Engineering +17