Publication | Closed Access
Analysis of tip deflection and force of a bimetallic cantilever microactuator
247
Citations
4
References
1993
Year
Electrical EngineeringEngineeringSoft RoboticsTip DeflectionMicrofabricationMechanicsElectromechanical PerformanceMechanical EngineeringMicromechanicsBimetallic Cantilever MicroactuatorActuationBimetallic Cantilever MicroactuatorsMicroactuatorBimetallic Cantilever BeamMechanics Of MaterialsMicro-electromechanical System
The authors present a model of the electromechanical performance of bimetallic cantilever microactuators by deriving the relationship between the tip deflection and change in temperature using a simple analytical approach. The model is verified by comparison with finite element analysis and published experimental data. The maximum tip force generated by a bimetallic cantilever beam is calculated by finding the reaction force needed at the tip to prevent cantilever beam deflection.
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