The growth of low resistivity, heavily Al-doped 4H–SiC thick epilayers by hot-wall chemical vapor deposition

Shiyang Ji, Kazutoshi Kojima, Yuuki Ishida, Shingo Saito, Tomohisa Kato, Hidekazu Tsuchida, Sadafumi Yoshida, Hajime Okumura

Journal of Crystal Growth · 2013 · 41 citations · 24 references

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