Effect of Sb as a surfactant on the inner diffusion of epilayer Ge atoms into Si substrate - Concepedia

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Effect of Sb as a surfactant on the inner diffusion of epilayer Ge atoms into Si substrate

14

Citations

6

References

1998

Year

Zuimin Jiang, Amei Xu, Dongzhi Hu, Haijun Zhu, Xiaohan Liu, Xingjun Wang, Mingchun Mao, Xiangjiu Zhang, Jihuang Hu, Daming Huang,

Thin Solid Films

Molecular SieveSi SubstrateEngineeringSurface ChemistrySurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationChemistrySilicon On InsulatorInner DiffusionEpilayer Ge

References

	Year	Citations

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