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Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties

DOI

23

Citations

42

References

2011

Year

H. Wojcik, Marcel Junige, W. Bartha, Matthias Albert, Virgínio Henrique de Miranda Lopes Neumann, U. Merkel, A. Peeva, Jürgen Gluch, S. Menzel, Frans Munnik,
Journal of The Electrochemical Society

Abstract

S.H166-H176

References

YearCitations

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