7
Publications
578
Citations
7
H-Index
2002
Active since
Affiliations
Oh-Kyum Kwon is an author at Korea Advanced Institute of Science and Technology specializing in corrosion, surface science, and engineering.
Top concepts
CorrosionEngineeringApplied PhysicsSurface ScienceMaterial ScienceChemical EngineeringMaterials Engineering
Publications per year
2002–2008
7
7
Atomic Layer Deposition of Ruthenium Thin Films for Copper Glue Layer
Oh-Kyum Kwon, Jae‐Hoon Kim, Hyoung-Sang Park et al. · Journal of The Electrochemical Society · 2004 · 171 citations
PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
Oh-Kyum Kwon, Se‐Hun Kwon, Hyoung-Sang Park et al. · Journal of The Electrochemical Society · 2004 · 110 citations
Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
Oh-Kyum Kwon, Se‐Hun Kwon, Hyoung-Sang Park et al. · Electrochemical and Solid-State Letters · 2004 · 95 citations
Rows per page
1–5 of 7