2
Publications
266
Citations
2
H-Index
2004
Active since
Affiliations
Hyoung-Sang Park is an author at Korea Advanced Institute of Science and Technology.
Publications per year
2004–2004
2
2
Atomic Layer Deposition of Ruthenium Thin Films for Copper Glue Layer
Oh-Kyum Kwon, Jae‐Hoon Kim, Hyoung-Sang Park et al. · Journal of The Electrochemical Society · 2004 · 171 citations
Plasma-Enhanced Atomic Layer Deposition of Ruthenium Thin Films
Oh-Kyum Kwon, Se‐Hun Kwon, Hyoung-Sang Park et al. · Electrochemical and Solid-State Letters · 2004 · 95 citations
Rows per page
1–2 of 2