Concepedia

Hyoung-Sang Park

HP

1

Publications

110

Citations

1

H-Index

2004

Active since

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Hyoung-Sang Park is an author at Korea Advanced Institute of Science and Technology.

Publications per year

2004–2004

1

Publications

1

PEALD of a Ruthenium Adhesion Layer for Copper Interconnects

Oh-Kyum Kwon, Se‐Hun Kwon, Hyoung-Sang Park et al. · Journal of The Electrochemical Society · 2004 · 110 citations

Rows per page

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