Concepedia

Jae-Sik Min

JM

5

Publications

220

Citations

5

H-Index

1996

Active since

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Jae-Sik Min is an author at Korea Advanced Institute of Science and Technology specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1996–2006

5

Publications

5

Plasma-Enhanced Atomic Layer Deposition of Ru–TiN Thin Films for Copper Diffusion Barrier Metals

Se‐Hun Kwon, Oh-Kyum Kwon, Jae-Sik Min et al. · Journal of The Electrochemical Society · 2006 · 66 citations

Atomic Layer Deposition of TiN Films by Alternate Supply of Tetrakis(ethylmethylamino)-Titanium and Ammonia

Jae-Sik Min, Young-Woong Son, Won-Gu Kang et al. · Japanese Journal of Applied Physics · 1998 · 62 citations

, , +15

Metal–organic atomic-layer deposition of titanium–silicon–nitride films

Jae-Sik Min, Hyung‐Sang Park, Sang‐Won Kang · Applied Physics Letters · 1999 · 44 citations · Full text

, , +11

Theoretical evaluation of film growth rate during atomic layer epitaxy

Hyung‐Sang Park, Jae-Sik Min, Lim Jungwook et al. · Applied Surface Science · 2000 · 32 citations

, , +7

Copper chemical vapour deposition using copper(I) hexafluoroacetylacetonate trimethylvinylsilane

Won‐Jun Lee, Jae-Sik Min, Sa‐Kyun Rha et al. · Journal of Materials Science Materials in Electronics · 1996 · 16 citations

, , +2

Rows per page

1–5 of 5