Sa‐Kyun Rha

Statistics

Publications

Citations

552

H-Index

Active since

1996

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Sejong University

Kyonggi University

Hanbat National University

Yonsei University

Sa‐Kyun Rha is an author at Korea Advanced Institute of Science and Technology specializing in materials science, materials engineering, and thin films.

Publications per year

1996–2012

Publications

Adhesion and interface chemical reactions of Cu/polyimide and Cu/TiN by XPS

Won‐Jun Lee, Youn-Seoung Lee, Youn-Seoung Lee et al. · Applied Surface Science · 2003 · 106 citations

Natural Sciences, Materials Engineering, Materials Science +12

Improved TiN film as a diffusion barrier between copper and silicon

Sa‐Kyun Rha, Won‐Jun Lee, Seung Yun Lee et al. · Thin Solid Films · 1998 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +14

Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3

Kwangchol Park, Won-Deok Yun, Byoungjun Choi et al. · Thin Solid Films · 2009 · 60 citations

Engineering, Materials Engineering, Materials Science +14

Structural and chemical stability of Ta–Si–N thin film between Si and Cu

Yoon-Jik Lee, Bong-Seok Suh, Sa‐Kyun Rha et al. · Thin Solid Films · 1998 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +12

Investigation of Silicon Oxide Thin Films Prepared by Atomic Layer Deposition Using SiH2Cl2and O3as the Precursors

Joo-Hyeon Lee, Un‐Jung Kim, Chang Hee Han et al. · Japanese Journal of Applied Physics · 2004 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +17

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