Concepedia

Bong-Seok Suh

BS

5

Publications

254

Citations

5

H-Index

1997

Active since

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Bong-Seok Suh is an author at Korea Advanced Institute of Science and Technology specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceThin FilmsMaterials EngineeringChemistryPhysicsCorrosionMicrostructure

Publications per year

1997–1999

5

Publications

5

Barrier properties and failure mechanism of Ta–Si–N thin films for Cu interconnection

Yoon-Jik Lee, Bong-Seok Suh, Myoung Seok Kwon et al. · Journal of Applied Physics · 1999 · 69 citations

Engineering, Cu Interconnection, Thin Film Process Technology +16

Properties of reactively sputtered WN x as Cu diffusion barrier

Bong-Seok Suh, Yoon-Jik Lee, Jeongsug Hwang et al. · Thin Solid Films · 1999 · 56 citations

Materials Science, Materials Engineering, Engineering +9

Structural and chemical stability of Ta–Si–N thin film between Si and Cu

Yoon-Jik Lee, Bong-Seok Suh, Sa‐Kyun Rha et al. · Thin Solid Films · 1998 · 54 citations

Materials Science, Engineering, Surface Science +8

Surface hardening of AISI 316L stainless steel using plasma carburizing

Bong-Seok Suh, Won‐Jong Lee · Thin Solid Films · 1997 · 51 citations

Materials Science, Materials Engineering, Surface Hardening +8

Co-sputter deposited Ta–Si diffusion barrier between Si and Cu: the effects of Si content on the barrier property

Yoon-Jik Lee, Bong-Seok Suh, Chong-Ook Park · Thin Solid Films · 1999 · 24 citations

Materials Science, Semiconductor Technology, Semiconductor Device +8

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