Thin Solid Films · 1998 · 54 citations · 12 references
Materials ScienceEngineeringSurface ScienceApplied PhysicsTa–si–n Thin FilmChemical StabilityThin Film Process TechnologyChemistryThin FilmsChemical Vapor DepositionThin Film Processing
12
Thermochemical data of pure substances
Choice Reviews Online · 1993 · 4.5K citations
Eicke R. Weber · Applied Physics A · 1983 · 1.2K citations