Joo-Hyeon Lee

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Active since

2004

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Hanbat National University

Sejong University

Joo-Hyeon Lee is an author at Korea Advanced Institute of Science and Technology specializing in semiconductor surfaces, thin films, and silicon thin films.

Publications per year

2004–2004

Publications

Investigation of Silicon Oxide Thin Films Prepared by Atomic Layer Deposition Using SiH2Cl2and O3as the Precursors

Joo-Hyeon Lee, Un‐Jung Kim, Chang Hee Han et al. · Japanese Journal of Applied Physics · 2004 · 44 citations

Natural Sciences, Materials Engineering, Materials Science +17

A comparative study on the Si precursors for the atomic layer deposition of silicon nitride thin films

Won‐Jun Lee, Joo-Hyeon Lee, Chong Ook Park et al. · Journal of the Korean Physical Society · 2004 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +17

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