46
Publications
2.2K
Citations
28
H-Index
1994
Active since
Sang‐Won Kang is an author at Korea Advanced Institute of Science and Technology specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceSurface ScienceThin FilmsMaterials EngineeringPhysicsElectrical EngineeringMicroelectronicsChemical Engineering
Publications per year
1994–2020
46
46
Atomic Layer Deposition of Ruthenium Thin Films for Copper Glue Layer
Oh-Kyum Kwon, Jae‐Hoon Kim, Hyoung-Sang Park et al. · Journal of The Electrochemical Society · 2004 · 171 citations
PEALD of a Ruthenium Adhesion Layer for Copper Interconnects
Oh-Kyum Kwon, Se‐Hun Kwon, Hyoung-Sang Park et al. · Journal of The Electrochemical Society · 2004 · 110 citations
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