Concepedia

H. Wojcik

HW

Statistics

Publications

6

Citations

147

H-Index

6

Active since

2009

Affiliations

Technische Universität Dresden(Current)

Leibniz Institute for Solid State and Materials Research

Helmholtz-Zentrum Dresden-Rossendorf

GlobalFoundries (United States)

GlobalFoundries (Germany)

H. Wojcik is an author at Technische Universität Dresden specializing in materials science, materials engineering, and natural sciences.

Publications per year

2009–2013

6

Publications

6

Atomic layer deposition for high aspect ratio through silicon vias

Martin Knaut, Marcel Junige, Volker Neumann et al. · Microelectronic Engineering · 2013 · 44 citations

Engineering, Materials Engineering, Materials Science +16

Electrical Evaluation of Ru–W(-N), Ru–Ta(-N) and Ru–Mn films as Cu diffusion barriers

H. Wojcik, R. Kaltofen, U. Merkel et al. · Microelectronic Engineering · 2011 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +15

Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties

H. Wojcik, Marcel Junige, W. Bartha et al. · Journal of The Electrochemical Society · 2011 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +16

Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films

S. Teichert, J. Thomas, L. Wilde et al. · Journal of The Electrochemical Society · 2009 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +17

Characterization of Ru–Mn composites for ULSI interconnects

H. Wojcik, Cornelia Krien, U. Merkel et al. · Microelectronic Engineering · 2013 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +9

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