Investigations on free-standing polysilicon beams in view of their application as transducers

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Design considerations for a practical electrostatic micro-motor

William S. Trimmer, K.J. Gabriel · Sensors and Actuators · 1987 · 229 citations

Engineering, Electrical Engineering, Mechatronics Engineering +14

Resonator sensors-a review

Robert M. Langdon · Journal of Physics E Scientific Instruments · 1985 · 215 citations

Engineering, Materials Engineering, Materials Science +17

IC-processed electrostatic micro-motors

Long-Sheng Fan, Yu‐Chong Tai, R.S. Muller · 2003 · 147 citations

Engineering, Electrical Engineering, Materials Science +17

Mechanical properties of fine grained polysilicon-the repeatability issue

H. Guckel, D.W. Burns, H.A.C. Tilmans et al. · 2003 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +17