14
Publications
703
Citations
12
H-Index
1987
Active since
Long-Sheng Fan is an author at IBM Research - Almaden specializing in mechanical engineering, microfabrication, and engineering.
Top concepts
EngineeringMicrofabricationMechanical EngineeringMechanical SystemsElectrical EngineeringMechatronicsMicroelectronicsFlexible ElectronicsSoft RoboticsMaterial Science
Publications per year
1987–2016
14
14
IC-processed electrostatic micro-motors
Long-Sheng Fan, Yu‐Chong Tai, R.S. Muller · 2003 · 147 citations
Electrical Engineering, Polysilicon Depositions, Engineering +15
Rows per page
1–5 of 14