Variational method for tensile stress evaluation and application to heavily boron-doped square-shaped silicon diaphragms

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

Osamu Tabata, Ken Kawahata, Susumu Sugiyama et al. · Sensors and Actuators · 1989 · 400 citations

Natural Sciences, Materials Engineering, Materials Science +16

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

A simple technique for the determination of mechanical strain in thin films with applications to polysilicon

H. Guckel, T. Randazzo, D.W. Burns · Journal of Applied Physics · 1985 · 270 citations

Natural Sciences, Materials Engineering, Materials Science +17

Microfabricated structures for the <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> measurement of residual stress, Young’s modulus, and ultimate strain of thin films

Mark G. Allen, Mehran Mehregany, Roger T. Howe et al. · Applied Physics Letters · 1987 · 253 citations

Natural Sciences, Materials Engineering, Materials Science +17