Concepedia

Effect of porogen residue on electrical characteristics of ultra low-k materials

Mikhaı̈l R. Baklanov, Larry Zhao, Els Van Besien, Marianna Pantouvaki

Microelectronic Engineering · 2010 · 46 citations · 18 references

DOI

Concepts

References

18

Low dielectric constant materials for microelectronics

Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations

, , +17

Optical dispersion relations for amorphous semiconductors and amorphous dielectrics

A. Rahim Forouhi, Iris Bloomer · Physical review. B, Condensed matter · 1986 · 754 citations

, , +17

Determination of pore size distribution in thin films by ellipsometric porosimetry

Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 509 citations

, , +17

Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition

S. M. Gates, D. Neumayer, Mark Sherwood et al. · Journal of Applied Physics · 2007 · 87 citations

, , +17

Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Lutz Prager, P. Maršík, Luise Wennrich et al. · Microelectronic Engineering · 2008 · 76 citations

, , +7