Effect of porogen residue on electrical characteristics of ultra low-k materials - Concepedia

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Effect of porogen residue on electrical characteristics of ultra low-k materials

46

Citations

18

References

2010

Year

Mikhaı̈l R. Baklanov, Larry Zhao, Els Van Besien, Marianna Pantouvaki

Microelectronic Engineering

Materials EngineeringMaterials ScienceElectrical EngineeringElectrical CharacteristicsEngineeringUltra Low-k MaterialsSolid-state IonicPorogen ResiduePorosityElectrical PropertyElectrochemistryElectrical Insulation

References

	Year	Citations

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