S. M. Gates

Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

A. Grill, S. M. Gates, Todd E. Ryan et al. · Applied Physics Reviews · 2014 · 286 citations · Full text

Engineering, Electrical Engineering, Materials Engineering +17

Extraction of kinetic parameters in temperature programmed desorption: A comparison of methods

James B. Miller, H. R. Siddiqui, S. M. Gates et al. · The Journal of Chemical Physics · 1987 · 246 citations

Natural Sciences, Chemistry, Materials Science +17

Silicon hydride etch products from the reaction of atomic hydrogen with Si(100)

S. M. Gates, Roderick R. Kunz, C. Michael Greenlief · Surface Science · 1989 · 233 citations

Natural Sciences, Chemistry, Materials Science +11

Silicon chemical vapor deposition one step at a time: fundamental studies of silicon hydride chemistry

Joseph M. Jasinski, S. M. Gates · Accounts of Chemical Research · 1991 · 220 citations

Natural Sciences, Chemistry, Materials Science +9

Adsorption kinetics of SiH4, Si2H6 and Si3H8 on the Si(111)-(7×7) surface

S. M. Gates · Surface Science · 1988 · 214 citations

Natural Sciences, Materials Engineering, Materials Science +12