Silicon hydride etch products from the reaction of atomic hydrogen with Si(100) - Concepedia

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Silicon hydride etch products from the reaction of atomic hydrogen with Si(100)

233

Citations

20

References

1989

Year

S. M. Gates, Roderick R. Kunz, C. Michael Greenlief

Surface Science

Chemical EngineeringEngineeringHydrogen TransitionAtomic HydrogenHydrogenChemistrySilicon On InsulatorPlasma Etching

References

	Year	Citations

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